Vacuum evaporation coating equipment
- Product name
- Vacuum Evaporation Coating Machine
- Evaporation Coating
- Coating color:
- Black, blue, rainbow, gold, rose gold.etc...
- Coating film
- TiN, TiCN, CrN, TiALN, ALTiN, TiC, Au, Etc...
- Operating method
- PLC+touch screen full controllin
Vacuum chamber size
Resistance evaporation power supply
Vacuum chamber material
SS304 superior stainless steel or superior carbon steel
Vacuum chamber structure
Vertical single/double door, back vacuum acquisition system
Better than 8.0x10-4Pa (no-load), leak rate1h≤0.6Pa
From atmosphere to 6.7×10-3Pa spend 8~15min (no-load)
Diffusion pump + roots pump + rotary vane pump + holding pump (can be adjusted)
Use automatic digital display vacuum gauge
Flow controller can be optional and with automatic control, also can be shifted between manual and automatic
Water-cooling circulatory system,cooling water tower or industrial cooling water machine is also needed (supplied by customer)
Manual or PLC + touch screen, can achieve automatic, manual and semi-automatic control
Alarm and protection
Water pressure alarm, atmosphere pressure alarm, over current protection, related protective measures and electrical interlock functions.
Water pressure≥0.2MPa, water temperature≤25℃, atmosphere pressure 0.5-0.8MPa
Specific configuration size can be designed according to customer requirements. Can be equipped with magnetron sputtering power supply and intermediate frequency power supply. Customizable vacuum chamber size range is D 500-3000mm, H: 500-3000mm.